The sputtering targets of disc-applied Pure silver, aluminum and copper alloy in UVTM were produced for characteristic of disc film, which are applied for VCD?CD/DVD-R,CD/DVD-ROM,CD/DVD-RW. The technology of making pure silver and aluminum&copper alloy film are main vacuum sputtering sediment. Having high-energy in sputtering sediment mote than other technology, excellent adhesives between film and glass substrate, lower sputtering voltage on the condition of basic same between alloy particle of film and target alloy particle. There are many of advanced equipment and detecting methods in manufacture, such as: fusion equipment, pured equipment and molding equipment. Target of silver, aluminum and copper alloy have high-pure(Ag=4N3),
Aluminum sputtering target-199A-1